JPS63308366A - 半導体集積回路 - Google Patents

半導体集積回路

Info

Publication number
JPS63308366A
JPS63308366A JP62145630A JP14563087A JPS63308366A JP S63308366 A JPS63308366 A JP S63308366A JP 62145630 A JP62145630 A JP 62145630A JP 14563087 A JP14563087 A JP 14563087A JP S63308366 A JPS63308366 A JP S63308366A
Authority
JP
Japan
Prior art keywords
capacitor
insulating film
gate insulating
semiconductor substrate
integrated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62145630A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0577340B2 (en]
Inventor
Hatsuhide Igarashi
五十嵐 初日出
Hirohisa Imamura
浩久 今村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62145630A priority Critical patent/JPS63308366A/ja
Publication of JPS63308366A publication Critical patent/JPS63308366A/ja
Publication of JPH0577340B2 publication Critical patent/JPH0577340B2/ja
Granted legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02TCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T10/00Road transport of goods or passengers
    • Y02T10/60Other road transportation technologies with climate change mitigation effect
    • Y02T10/70Energy storage systems for electromobility, e.g. batteries

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP62145630A 1987-06-10 1987-06-10 半導体集積回路 Granted JPS63308366A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62145630A JPS63308366A (ja) 1987-06-10 1987-06-10 半導体集積回路

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62145630A JPS63308366A (ja) 1987-06-10 1987-06-10 半導体集積回路

Publications (2)

Publication Number Publication Date
JPS63308366A true JPS63308366A (ja) 1988-12-15
JPH0577340B2 JPH0577340B2 (en]) 1993-10-26

Family

ID=15389448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62145630A Granted JPS63308366A (ja) 1987-06-10 1987-06-10 半導体集積回路

Country Status (1)

Country Link
JP (1) JPS63308366A (en])

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04370965A (ja) * 1991-06-20 1992-12-24 Fujitsu Ltd 半導体装置
US5631492A (en) * 1994-01-21 1997-05-20 Motorola Standard cell having a capacitor and a power supply capacitor for reducing noise and method of formation
WO2007004258A1 (ja) * 2005-06-30 2007-01-11 Spansion Llc 半導体装置、およびその製造方法
JP2008028397A (ja) * 2006-07-21 2008-02-07 Integrant Technologies Inc 並列バラクタを利用したキャパシタ
JP2009194891A (ja) * 2008-01-15 2009-08-27 Toshiba Corp 高周波スイッチ回路
WO2014193503A1 (en) * 2013-05-28 2014-12-04 Newlans, Inc. High linearity variable capacitor array
US9086709B2 (en) 2013-05-28 2015-07-21 Newlans, Inc. Apparatus and methods for variable capacitor arrays
US9362882B1 (en) 2015-01-23 2016-06-07 Tdk Corporation Apparatus and methods for segmented variable capacitor arrays
US9461609B2 (en) 2014-12-03 2016-10-04 Tdk Corporation Apparatus and methods for high voltage variable capacitor arrays with feed-forward capacitors
US9595942B2 (en) 2015-03-30 2017-03-14 Tdk Corporation MOS capacitors with interleaved fingers and methods of forming the same
US9671812B2 (en) 2014-12-17 2017-06-06 Tdk Corporation Apparatus and methods for temperature compensation of variable capacitors
US9680426B2 (en) 2015-03-27 2017-06-13 Tdk Corporation Power amplifiers with tunable notches
US9735752B2 (en) 2014-12-03 2017-08-15 Tdk Corporation Apparatus and methods for tunable filters
US9973155B2 (en) 2015-07-09 2018-05-15 Tdk Corporation Apparatus and methods for tunable power amplifiers
US10042376B2 (en) 2015-03-30 2018-08-07 Tdk Corporation MOS capacitors for variable capacitor arrays and methods of forming the same
US10073482B2 (en) 2015-03-30 2018-09-11 Tdk Corporation Apparatus and methods for MOS capacitor structures for variable capacitor arrays
US10382002B2 (en) 2015-03-27 2019-08-13 Tdk Corporation Apparatus and methods for tunable phase networks

Cited By (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04370965A (ja) * 1991-06-20 1992-12-24 Fujitsu Ltd 半導体装置
US5631492A (en) * 1994-01-21 1997-05-20 Motorola Standard cell having a capacitor and a power supply capacitor for reducing noise and method of formation
WO2007004258A1 (ja) * 2005-06-30 2007-01-11 Spansion Llc 半導体装置、およびその製造方法
JPWO2007004258A1 (ja) * 2005-06-30 2009-01-22 スパンション エルエルシー 半導体装置、およびその製造方法
US8076753B2 (en) 2005-06-30 2011-12-13 Spansion Llc Semiconductor device and method of manufacturing the same
US8642422B2 (en) 2005-06-30 2014-02-04 Spansion Llc Method of manufacturing a semiconductor device
US8698280B2 (en) 2005-06-30 2014-04-15 Spansion Llc Capacitive element using MOS transistors
JP2008028397A (ja) * 2006-07-21 2008-02-07 Integrant Technologies Inc 並列バラクタを利用したキャパシタ
JP2009194891A (ja) * 2008-01-15 2009-08-27 Toshiba Corp 高周波スイッチ回路
US9449749B2 (en) 2013-05-28 2016-09-20 Tdk Corporation Signal handling apparatus for radio frequency circuits
WO2014193503A1 (en) * 2013-05-28 2014-12-04 Newlans, Inc. High linearity variable capacitor array
US9086709B2 (en) 2013-05-28 2015-07-21 Newlans, Inc. Apparatus and methods for variable capacitor arrays
US9110483B2 (en) 2013-05-28 2015-08-18 Newlans, Inc. Apparatus and methods for variable capacitor arrays
US9201442B2 (en) 2013-05-28 2015-12-01 Newlans, Inc. Apparatus and methods for variable capacitor arrays
CN105359409A (zh) * 2013-05-28 2016-02-24 纽伦斯股份有限公司 高线性可变电容器阵列
US9658636B2 (en) 2013-05-28 2017-05-23 Tdk Corporation Apparatus and methods for variable capacitor arrays
US9019007B2 (en) 2013-05-28 2015-04-28 Newlans, Inc. High linearity variable capacitor array
US9570222B2 (en) 2013-05-28 2017-02-14 Tdk Corporation Vector inductor having multiple mutually coupled metalization layers providing high quality factor
US9461610B2 (en) 2014-12-03 2016-10-04 Tdk Corporation Apparatus and methods for high voltage variable capacitors
US9515631B2 (en) 2014-12-03 2016-12-06 Tdk Corporation Apparatus and methods for high voltage variable capacitor arrays with body-to-gate diodes
US9461609B2 (en) 2014-12-03 2016-10-04 Tdk Corporation Apparatus and methods for high voltage variable capacitor arrays with feed-forward capacitors
US9673774B2 (en) 2014-12-03 2017-06-06 Tdk Corporation Apparatus and methods for high voltage variable capacitor arrays with body biasing resistors
US9634634B2 (en) 2014-12-03 2017-04-25 Tdk Corporation Apparatus and methods for high voltage variable capacitor arrays with drift protection resistors
US9735752B2 (en) 2014-12-03 2017-08-15 Tdk Corporation Apparatus and methods for tunable filters
US9671812B2 (en) 2014-12-17 2017-06-06 Tdk Corporation Apparatus and methods for temperature compensation of variable capacitors
US9362882B1 (en) 2015-01-23 2016-06-07 Tdk Corporation Apparatus and methods for segmented variable capacitor arrays
US9680426B2 (en) 2015-03-27 2017-06-13 Tdk Corporation Power amplifiers with tunable notches
US10382002B2 (en) 2015-03-27 2019-08-13 Tdk Corporation Apparatus and methods for tunable phase networks
US9595942B2 (en) 2015-03-30 2017-03-14 Tdk Corporation MOS capacitors with interleaved fingers and methods of forming the same
US10042376B2 (en) 2015-03-30 2018-08-07 Tdk Corporation MOS capacitors for variable capacitor arrays and methods of forming the same
US10073482B2 (en) 2015-03-30 2018-09-11 Tdk Corporation Apparatus and methods for MOS capacitor structures for variable capacitor arrays
US9973155B2 (en) 2015-07-09 2018-05-15 Tdk Corporation Apparatus and methods for tunable power amplifiers

Also Published As

Publication number Publication date
JPH0577340B2 (en]) 1993-10-26

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